The Semiconductor Supply Chain in the Low GWP/PFAS-Free Chemistry Era
May 22 (Thursday), 2025
11:30 am to 12:30 pm (EDT)
Virtual via Zoom
Presentation to be made available for download soon
Abstract: Sustainability policy across the globe has become a major driver of change for the semiconductor industry and its supply chain. New net-zero emission goals and overall phase-out targets for PFAS materials are a noble cause, but an exemplary challenge to solve in a relatively short time. In this presentation, we will review the critical nature of PFAS and the widespread impact of these materials across the ecosystem. The evolution of fluorocarbon (FC) and hydrofluorocarbon (HFC) etch gas materials, a subset of PFAS which are essential in plasma processing applications, will be discussed in detail. The talk will then summarize ongoing and recent efforts to begin exploring (1) process optimization to minimize PFAS and high global-warming potential FC/HFC gas usage, (2) alternative low GWP or PFAS free material exploration, (3) PFAS sources in wet chemicals and PFAS free material usage challenges and (4) capture/recovery/abatement opportunities to avoid release of these materials after use. Future opportunities for solutions with full on-site circularity will also be reviewed. The challenge throughout will be to satisfy all process metrics for success and bring them towards full scale adoption industry wide and verify that the net addition of these materials ultimately improves sustainability.
Biographies: Dr. Eric A. Joseph is a Principal Research Scientist at IBM Research, having joined IBM in 2005. Currently, he is the research division lead for strategic supply chain relationships supporting advanced unit process development. In his role, he is the champion for recent efforts and engagements to develop sustainable semiconductor supply chain solutions for IBM’s R&D ecosystem. He is an author or co-author of over 75 technical papers, has over 90 patents filed or pending, and is an AVS Fellow.
Dr. Gautam Banerjee is Program Manager at IBM Semiconductors. Prior to 2023, he held various global managerial and technical positions at Micron Technology, Air Products, Ashland Chemicals and Rodel. As part of his role, he champions internal efforts to introduce sustainable semiconductor manufacturing processes and engagements with partners to join IBM’s R&D ecosystem. He also represents IBM Research as Semiconductor Industry Association PFAS Work Group member for multiple focused areas. He is an author or co-author of several peer-reviewed papers, patents and a book chapter.
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